XR Training System for Semiconductor Equipment Maintenance
Actual semiconductor equipment involves various hazardous elements, including high-pressure gases, high-voltage systems, vacuum systems, and RF power. As a result, it can be difficult to repeatedly practice equipment disassembly, fault reproduction, and maintenance procedures using real equipment.
Faraday XR M brings these training challenges into an XR environment, providing a semiconductor equipment maintenance training system where learners can repeatedly practice everything from equipment disassembly and assembly to fault diagnosis and preventive maintenance, based on the structures and maintenance procedures of actual semiconductor equipment.
The system virtually recreates a connected semiconductor process environment consisting of Gas Cabinet, CVD Equipment, and Scrubber, with equipment conditions and fault scenarios changing according to the learner’s actions and decisions.
[Faraday XR M_Maintenance Room]
Hands-On Maintenance Training Based on Real Equipment Structures
Gas Cabinet · CVD Equipment · Scrubber as an Integrated System
Faraday XR M goes beyond teaching the operation of individual pieces of equipment. It enables learners to understand the structures and interrelationships of Gas Cabinet, CVD Equipment, and Scrubber within a connected semiconductor process environment.
Learners can directly disassemble and assemble equipment components in a way that closely resembles actual maintenance work, inspect the condition of individual components, and perform maintenance procedures.
Without using actual semiconductor equipment, learners can experience equipment structures and maintenance processes in a safe and repeatable XR environment.
[Faraday XR M_Chamber Assembly Process]
Reactive Fault Diagnosis Driven by Learner Actions
Faraday XR M moves beyond training based on fixed, predetermined scenarios. Training outcomes can change depending on the learner’s actions and decisions.
Through Faraday XR M’s core technologies, Reactive Parameter and Reactive Parameter Link, learner actions can affect not only the current equipment state but also subsequent operating conditions and fault occurrences.
For example, if a component is incorrectly assembled or a maintenance procedure is performed incorrectly, the equipment condition may change and lead to subsequent fault scenarios.
Learners must observe the resulting symptoms, trace the underlying cause, and determine the appropriate corrective action.
Because different actions and decisions can lead to different fault paths and diagnostic outcomes, Faraday XR M helps learners develop problem-solving skills required for real-world equipment maintenance, rather than simply memorizing procedures.
Hands-On XR Training Without Controllers
Faraday XR M provides an intuitive two-handed interaction environment designed to closely resemble actual maintenance work.
With Hand Tracking technology, learners can interact with equipment using both hands without requiring dedicated controllers. They can grab, move, disassemble, and assemble equipment components directly within the XR environment.
3D graphics provide contextual information that helps learners intuitively understand small components and complex equipment structures.
To reduce interaction errors in the XR environment, key UI elements are designed for enhanced visibility and accessibility. The system also allows users to adjust movement speed and rotation sensitivity for comfortable participation during extended training sessions.
Rather than focusing on learning how to operate XR equipment, Faraday XR M is designed to help learners focus on maintenance procedures, decision-making, and problem-solving.